Air-to-Air Heat Exchangers & Heat Recovery · Since 2005

Heat Recovery for Semiconductor and Electronics Cleanrooms

Heat rejection under strict cleanliness

Semiconductor and electronics cleanrooms maintain ultra-clean, tightly controlled air, and the process equipment generates significant heat. Cooling that air while preserving cleanliness is energy-intensive; air-to-air recovery can reject heat to an external loop without ever mixing the clean and ambient airstreams.

Suitable exchanger types and how they work

Sealed plate exchangers and heat-pipe cores are favored because they move heat with no fans on the device and zero leakage between loops. Indirect evaporative cooling adds a water side for very low supply temperatures while keeping the clean loop isolated.

Design considerations for cleanrooms

Leakage between the clean and external loops must be essentially zero — specify IP-rated, sealed cores. Use materials compatible with cleanroom air quality, monitor pressure drop on the fan side, and size for peak equipment heat density. Access for certified cleaning protects the controlled environment.

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